Characteristic of Porous Carbon Chuck

• Uniform pore size of less than 5 μm
• Half the weight of aluminum
• It has excellent conductivity and is effective in static electricity
• You can match the size(Up to 2500mm)
• Strong against particles
• No static electricity

The purpose of Porous Carbon Chuck

• Table for attaching wafer surface protective tape
• Adsorption table for peeling off wafer surface protection tape
• Adsorption table for wafer inspection equipment
• The adsorption table of the UV irradiation device
• Handling of wafer mounter device
• Wafer cleaning device spinner head
• TSV process
• Dicing process
• Background process

It is widely used as basic materials in various industries such as filters, high-temperature refractories, high-temperature teeth, absorbent materials, sound absorption materials, lightweight structures, and insulation materials