It has excellent conductivity and is effective in static electricity
You can match the size(Up to 2500mm)
Strong against particles
No static electricity
The purpose of Porous Carbon Chuck
Table for attaching wafer surface protective tape
Adsorption table for peeling off wafer surface protection tape
Adsorption table for wafer inspection equipment
The adsorption table of the UV irradiation device
Handling of wafer mounter device
Wafer cleaning device spinner head
TSV process
Dicing process
Background process
It is widely used as basic materials in various industries such as filters, high-temperature refractories, high-temperature teeth, absorbent materials, sound absorption materials, lightweight structures, and insulation materials