ARC CONTROL

• When ARC occurs during output, cut off and restart the output
• Output blocking function in case of repeated ARC occurrence

Load discharge function

• Output toggle function operation to discharge the load
• Dechucking function can be set up(Auto Toggle waveform can be changed)

A power supply device of a core component recognition chuck that fixes the substrate to the lower electrode using the force of static electricity inside the vacuum chamber of semiconductor and LCD manufacturing equipment